ULSI器件电路与系统

本书介绍特大规模集成器件、电路及系统的基本知识、正在发展中的前沿技术，以及我国科学家在该领域的工作。全书共十章，内容包括：深亚微米MOS器件的结构与物理，超大规模集成电路中的互连线延时，系统集成中的...

ULSI 器件 电路 与 系统

Ulsi Process Integration III

...

Ulsi Process Integration III

Ulsi Process Integration

...

Ulsi Process Integration

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications

This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tung...

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI ULSI Applications

Tungsten and Other Advanced Metals for Ulsi Applications in 1990

...

Tungsten and Other Advanced Metals for Ulsi Applications in 1990

ULSI Devices

A complete guide to current knowledge and future trends in ULSI devices Ultra-Large-Scale Integrati...

ULSI Devices

Characterization and Metrology for ULSI Technology 2005

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon...

Characterization and Metrology for ULSI Technology 2005