Micromachined
Micromachined Thin-film Sensors for SOI-CMOS Co-integration
ISBN:9780387288420Co-integration of sensors with their associated electronics on a single silicon chip may provide ma...
Micromachined Thin film Sensors for SOI CMOS Co integration
Micromachined Devices and Components V
ISBN:9780819434739...
Micromachined Devices and Components V