Thin Film Materials Technology

副标题: Sputtering of Compound Materials

ISBN: 9780815514831

出版社: Noyes Publications

出版年: 2003-09

页数: 532

定价: USD 168.00

装帧: Hardcover

内容简介

Reviews basic thin film technology and desposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. Offers principles and practical examples.