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High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films
High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films
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High-Rate Reactive Magnetron Sputter Deposition and Characterization of Metal Oxide Films
ISBN: 9789155446833
定价: 213.00
关键词：
High
Rate
Reactive
Magnetron
Sputter
Deposition
and
Characterization
of
Metal
Oxide
Films